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[benchmark] V Shulga 2025: comparison of SRIM, OKSANA, TRIM.SP, and ACAT sputtered atom energy spectra #291

@drobnyjt

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@drobnyjt

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Paper here.

From the abstract:
"
The energy spectra and average energies of sputtered atoms were calculated for a number of amorphous targets (Si, Ti, Ni, V and Nb) bombarded with 1 keV Ar ions. The calculations were carried out using the computer simulation programs OKSANA and SRIM-2013.
...
A good agreement of the OKSANA, TRIM.SP and ACAT simulations is noted.
"

Source
Source of data for benchmark; a paper, code, or database with sputtering yields, reflection coefficients, etc.

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